DocumentCode
559612
Title
Multi-component hot embossing of micro- and nanosystems
Author
Kolew, Alexander ; Heilig, Markus ; Sikora, Karsten ; Münch, Daniel ; Worgull, Matthias
Author_Institution
Inst. of Microstructure Technol. (IMT), Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
fYear
2011
fDate
11-13 May 2011
Firstpage
284
Lastpage
287
Abstract
The combination of different polymer materials during replication offers additional opportunities for fabrication and functionality of microsystems. Different surface and structural properties of polymers allow for improvements in microsystems for example by means of hydrophilic and hydrophobic combinations in microfluidic devices. Due to its high flexibility and precision hot embossing as one of the established micro replication processes facilitates processing of several polymer layers in one single process step. By this multi-component process microstructured systems consisting of thin layers of different polymers with adapted surface properties are fabricated. In this paper we describe the challenge of molding different types of polymers and some applications for multi-component microsystems.
Keywords
hydrophilicity; hydrophobicity; microfluidics; nanotechnology; polymers; fabrication; hydrophilic combinations; hydrophobic combinations; micro replication process; microfluidic devices; microsystems; multi-component hot embossing; nanosystems; polymer materials; Embossing; Force; Injection molding; Microfluidics; Polymers; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
Conference_Location
Aix-en-Provence
Print_ISBN
978-1-61284-905-8
Type
conf
Filename
6108024
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