• DocumentCode
    559612
  • Title

    Multi-component hot embossing of micro- and nanosystems

  • Author

    Kolew, Alexander ; Heilig, Markus ; Sikora, Karsten ; Münch, Daniel ; Worgull, Matthias

  • Author_Institution
    Inst. of Microstructure Technol. (IMT), Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
  • fYear
    2011
  • fDate
    11-13 May 2011
  • Firstpage
    284
  • Lastpage
    287
  • Abstract
    The combination of different polymer materials during replication offers additional opportunities for fabrication and functionality of microsystems. Different surface and structural properties of polymers allow for improvements in microsystems for example by means of hydrophilic and hydrophobic combinations in microfluidic devices. Due to its high flexibility and precision hot embossing as one of the established micro replication processes facilitates processing of several polymer layers in one single process step. By this multi-component process microstructured systems consisting of thin layers of different polymers with adapted surface properties are fabricated. In this paper we describe the challenge of molding different types of polymers and some applications for multi-component microsystems.
  • Keywords
    hydrophilicity; hydrophobicity; microfluidics; nanotechnology; polymers; fabrication; hydrophilic combinations; hydrophobic combinations; micro replication process; microfluidic devices; microsystems; multi-component hot embossing; nanosystems; polymer materials; Embossing; Force; Injection molding; Microfluidics; Polymers; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on
  • Conference_Location
    Aix-en-Provence
  • Print_ISBN
    978-1-61284-905-8
  • Type

    conf

  • Filename
    6108024