DocumentCode
562516
Title
Influence of internal stress surface distribution on accuracy of surface acoustic wave devices
Author
Melnychuk, Andrii
Author_Institution
Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2012
fDate
21-24 Feb. 2012
Firstpage
523
Lastpage
523
Abstract
In this paper influence of internal stress surface distribution on accuracy of surface acoustic wave devices is described. Analytical study of influence is proposed. Fields of application of this study are described.
Keywords
surface acoustic wave devices; internal stress surface distribution; surface acoustic wave devices accuracy; Surface acoustic waves; Internal stress; stress distribution; surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering Telecommunications and Computer Science (TCSET), 2012 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-1-4673-0283-8
Type
conf
Filename
6192753
Link To Document