DocumentCode
562533
Title
New approach for modeling processes of doping redistribution during oxidization
Author
Berezhansky, Volodymyr
Author_Institution
Precarpathian Nat. Univ., Ivano-Frankivsk, Ukraine
fYear
2012
fDate
21-24 Feb. 2012
Firstpage
545
Lastpage
545
Abstract
Redistribution of doping during diffusive -oxidizing processes is simulated. The optimal technological conditions of diffusive -oxidizing processes is determined.
Keywords
doping profiles; oxidation; Deale-Grove model; diffusive-oxidizing processes; doping concentration; doping redistribution; Alloying; Oxidation; The Deale-Grove´s model; diffusive - oxidizing processes; interphase border; numerical methods; quasilinear process;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering Telecommunications and Computer Science (TCSET), 2012 International Conference on
Conference_Location
Lviv-Slavske
Print_ISBN
978-1-4673-0283-8
Type
conf
Filename
6192770
Link To Document