• DocumentCode
    572738
  • Title

    Preparation of thin films by ablation with anaconda ion beam generator

  • Author

    Yatsui, K. ; Jiang, Wei ; Davis, H.A. ; Olson, J.C. ; Waganaar, W.J. ; Rej, D.

  • Author_Institution
    Laboratory of Beam Technology, Nagaoka University of Technology, Niigata 940-21, Japan
  • Volume
    2
  • fYear
    1996
  • fDate
    10-14 June 1996
  • Firstpage
    894
  • Lastpage
    897
  • Abstract
    Thin films of silicon carbide are produced by using the technology of ion beam evaporation. Various analytical methods are used to analyze film thickness, film composition and crystallizability for samples obtained with different target-substrate distances.
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    High-Power Particle Beams, 1996 11th International Conference on
  • Conference_Location
    Prague, Czech Republic
  • Print_ISBN
    978-80-902250-3-9
  • Type

    conf

  • Filename
    6308481
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=572738