Design and research of solid state RF power controller

A power controller is the core component of the solid-state RF power supply, which has great impact on the stability of RF power. First, the structure of solid-state RF power was introduced, then according to requirements of ICP source on RF power, the hardware and software of the controller were both designed and studied. The structure of controller and the principles of RF power control were described as well as the two working stages of ICP source, and the application of expert PID control algorithm in the controller was focused on. The results show that the success rate of ICP ignition can be improved by the designed power controller, and the RSD of power stability which can meet ICP source requirements of power stability can reach 0.7⁰/₀₀ during the measurements.