Double-layer silicon photonic crystal fiber tip temperature sensor

Author

Park, Bryan ; Jung, Il Woong ; Provine, J. ; Howe, Roger T. ; Solgaard, Olav

Author_Institution

Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA

fYear

2012

fDate

23-27 Sept. 2012

Firstpage

550

Lastpage

551

Abstract

We describe the fabrication of a double-layer silicon photonic crystal using self-aligned CMOS-compatible processes and its assembly on a single mode fiber using a wafer template and epoxy bonding. The fiber sensor has sharper resonances and higher temperature sensitivity than the previously-reported single-layer sensor. The new assembly method facilitates batch-production of the sensor and allows for extension to high temperature measurement.

Keywords

elemental semiconductors; fibre optic sensors; holey fibres; optical fabrication; photonic crystals; silicon; temperature sensors; Si; double-layer silicon photonic crystal fiber tip temperature sensor; epoxy bonding; higher-temperature sensitivity; optical fabrication; self-aligned CMOS-compatible processes; single-mode fiber assembly; wafer template; Optical fiber couplers; Optical fiber sensors; Sensitivity; Silicon; Temperature measurement; Temperature sensors; GOPHER; double-layer photonic crystal; fiber sensor; temperature sensing; template-assisted epoxy bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Conference (IPC), 2012 IEEE

Conference_Location

Burlingame, CA

Print_ISBN

978-1-4577-0731-5

Type

conf

DOI

10.1109/IPCon.2012.6358738

Filename

6358738