DocumentCode
588137
Title
28nm FDSOI offer for academia and industry
Author
Torki, Kholdoun
Author_Institution
CMP, Grenoble, France
fYear
2012
fDate
1-4 Oct. 2012
Firstpage
1
Lastpage
25
Abstract
The presentations of slides covers the following topics: CMP process; FDSOI; design kits; and standard cells library.
Keywords
chemical mechanical polishing; integrated circuit design; silicon-on-insulator; CMP process; FDSOI; design kits; size 28 nm; standard cells library; Conferences; Educational institutions; Industries; Joining processes; Libraries; Prototypes;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2012 IEEE International
Conference_Location
NAPA, CA
ISSN
1078-621X
Print_ISBN
978-1-4673-2690-2
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2012.6404351
Filename
6404351
Link To Document