Study on Microscanning Hartmann Wavefront Sensor for Optical System Image Testing

With the development of advanced science and technology, Hartmann wave front sensor has been widely used in adaptive optics, active optics and optical system detection, which it has many advantages, for instance, a compact structure and a good real-time quality. Otherwise, micro-scanning can make up for the drawback that the low detected accuracy cannot be satisfied to the requirement of a high accuracy detection due to the less detector pixel number in measurement of optical system. In this paper, a new standpoint of combining HWS with micro-scanning technique has been put forward, and then HWS realizes a high detected accuracy with low detector pixel number. It mainly discusses the system structural form of the new Hartmann wave front sensor, the selection of added micro-scanning mode and the related analysis of precision.