Robust surface reconstruction in SEM with Two BSE detectors

This paper proposed a robust 3D surface reconstruction method which could automatically eliminate shadowing errors. For modeling shadowing effect, a new shadowing compensation model is introduced based on angle distribution of backscattered electrons and further modified with some practical factors. Furthermore, the presented iterative shadowing compensation, which performs commutatively between compensation of image intensities and modification of 3D surface, can effectively provide both the accuracy 3D surface and the compensated images after convergence.