DocumentCode
594175
Title
Investigation of structural, morphological and optical properties of GaN/AlGaN heterostructures on Si
Author
Saraswati, I. ; Poepawati, N. ; Retno, W.P. ; Dogheche, E. ; Decoster, D. ; Ko, Sungyeon ; Cho, Young H. ; Considine, L. ; Pavlidis, Dimitris
Author_Institution
Inst. of Electron., Microelectron. & Nanotechnol., Univ. de Lille 1, Villeneuve-d´Ascq, France
fYear
2012
fDate
13-16 Dec. 2012
Firstpage
1
Lastpage
5
Abstract
A good justification for gallium nitride on silicone is the potential for integrated optoelectronic circuits and for the low cost bring by growth of GaN on a large size wafers. Actually, the application interest for GaN/Si is power electronics. This work focused on the optimization of the growth process for GaN/Si and the relation between the structure and the optical properties. Using the guided wave prism coupling technique, we have fully established the index dispersion of GaN at room temperature and its temperature dependence in the wavelength range 0.4 to 1.5μm. We report a slightly low temperature dependence. Results demonstrated excellent waveguide properties of GaN on silicon with optical propagation loss below 1dB/cm. We compared trhe results on Si with those on sapphire. This opens a real opportunity of future device using this technology.
Keywords
III-V semiconductors; aluminium compounds; gallium compounds; light propagation; optical losses; optical waveguides; optimisation; refractive index; semiconductor growth; semiconductor heterojunctions; wide band gap semiconductors; GaN growth; GaN index dispersion; GaN waveguide properties; GaN-AlGaN; GaN-AlGaN heterostructures; Si; growth process optimization; guided wave prism coupling technique; integrated optoelectronic circuits; large size wafers; morphological properties; optical propagation loss; optical properties; power electronics; silicone; structural properties; temperature dependence; wavelength 0.4 mum to 1.5 mum; Gallium nitride; Integrated optics; Optical films; Optical reflection; Optical refraction; Optical waveguides; Silicon; gallium nitride; microstructure; refractive index; silicon; temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Global Conference (PGC), 2012
Conference_Location
Singapore
Print_ISBN
978-1-4673-2513-4
Type
conf
DOI
10.1109/PGC.2012.6458110
Filename
6458110
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