Multi-CNTFETs for power device applications: Investigation of CCVD grown CNTs by means of atomic force microscopy

In this work we use atomic force microscopy to explore carbon nanotubes (CNTs) which are grown by means of catalytic chemical vapor deposition (CCVD). The used process can be utilized to fabricate hundreds of carbon nanotube field-effect transistors (CNTFETs) for logic as well as for power device applications. The application type is selected through specially patterned source/drain contacts which either allow only one linking CNT (logic applications) or provide large scale parallelization of numerous CNTs (“multi-CNTFET”) for power device applications.