DocumentCode
614964
Title
Equipment automation framework with embedded Interface-A
Author
Kinauer, Jochen ; Muller, Benjamin
Author_Institution
AIS Autom. Dresden GmbH, Dresden, Germany
fYear
2013
fDate
14-16 May 2013
Firstpage
138
Lastpage
141
Abstract
Project report based on the development and deployment of an equipment automation framework at a 200mm semiconductor fab. The emphasis of this paper will be on the integrated Interface-A Port and the capabilities of the EES System - including screenshots of the implemented system.
Keywords
production equipment; semiconductor industry; EES system; embedded interface-A port; equipment automation framework; integrated interface-A port; semiconductor fab; Automation; Manufacturing; Ports (Computers); Process control; Production facilities; Software; Standards;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2013 24th Annual SEMI
Conference_Location
Saratoga Springs, NY
ISSN
1078-8743
Print_ISBN
978-1-4673-5006-8
Type
conf
DOI
10.1109/ASMC.2013.6552802
Filename
6552802
Link To Document