RF-MEMS switch design optimization for long-term reliability

Author

Mulloni, V. ; Solazzi, Francesco ; Resta, Giovanni ; Giacomozzi, Flavio ; Margesin, Benno

Author_Institution

Fondazione B. Kessler (FBK-CMM), Trento, Italy

fYear

2013

fDate

16-18 April 2013

Firstpage

1

Lastpage

6

Abstract

This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.

Keywords

contact resistance; microswitches; optimisation; reliability; capacitive switch; clamped-clamped RF-MEMS switches; contact resistance; geometrical characteristics; long-term reliability; long-term stress actuation tests; mechanical characteristics; ohmic switch; optimization; switch properties control; Contacts; Electrical resistance measurement; Force; Gold; Stress; Switches; Voltage measurement; RF-switch; long-term measurements; reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on

Conference_Location

Barcelona

Print_ISBN

978-1-4673-4477-7

Type

conf

Filename

6559424