Microelectroforming of a nickel nozzle plate featured with anti-stiction for a piezoelectric atomizer

Author

Jheng-Jhih Huang ; Chin-Tai Chen

Author_Institution

Mech. Eng., Nat. Kaohsiung Univ. of Appl. Sci., Kaohsiung, Taiwan

fYear

2013

fDate

7-10 April 2013

Firstpage

490

Lastpage

493

Abstract

Micro atomizers have been popular over decades for many applications such as cooling, medical care and inkjet printing that were driven by reciprocal piezoelectric effect. The paper presents a simple but user-friendly design for the production of a piezoelectric atomizer utilizing a nickel nozzle plate with micro anti-stiction cavities on surface. Two PMMA substrates are specifically designed and bonded to carry out the capping, forming a micro atomizer in the study. Micro droplets (each volume ~ 36 pl) are able to be jetted out of the fluidic nozzles with a typical diameter of ~ 30 μm by driving the back piezoelectric plate. The thermal images of infrared thermograph into the spraying space are captured and analyzed for this cooling process.

Keywords

cooling; drops; infrared imaging; microcavities; microfluidics; nickel; nozzles; piezoelectric devices; spraying; PMMA substrates; antistiction; capping; cooling process; fluidic nozzle; infrared thermograph; microanti-stiction cavities; microatomizer; microdroplet; microelectroforming; nickel nozzle plate; piezoelectric atomizer production; piezoelectric plate; reciprocal piezoelectric effect; spraying space; thermal image; user-friendly design; Biomedical imaging; Cooling; Decision support systems; Nickel; Piezoelectric effect; Printing; Production; anti-stiction; atomizer; microelectroforming;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559777

Filename

6559777