Robotic nanowire handling for prototypic NEMS switching and resonator devices

Author

Bartenwerfer, Malte ; Fatikow, Sergej

Author_Institution

Dept. of Comput. Sci., Univ. of Oldenburg, Oldenburg, Germany

fYear

2013

fDate

7-10 April 2013

Firstpage

787

Lastpage

790

Abstract

In this paper the usage of a nanorobotic handling technique is presented for the transfer of individual nanowires with diameters of several 100 nanometers and length of about 10 μm. Both, handling and assembly take place inside a SEM and use electron beam induced deposition (EBiD) as well as focused ion beam (FIB) milling. The handled nanowires are used to assembly a NEMS device, namely an electrostatic switch design and a resonator, where the nanowire acts as switching contact and resonant component, respectively. Feasibility, working principle, reproducibility and specific values of the switches are investigated, as well as the conductivity of the nanowires itself.

Keywords

focused ion beam technology; nanoelectromechanical devices; nanowires; resonators; robotic assembly; scanning electron microscopy; switches; EBiD; FIB milling; NEMS device assembly; SEM; electron beam induced deposition; electrostatic switch design; focused ion beam milling; nanorobotic handling technique; nanowire conductivity; nanowire transfer; prototypic NEMS switching; resonant component; resonator; resonator devices; robotic nanowire handling; switch specific values; switching contact; working principle; Assembly; Carbon nanotubes; Electrodes; Materials; Nanoscale devices; Sensors; Switches; NEMS; nanowire; robotic handling;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559845

Filename

6559845