Analysis of electromechanical interface model for liquid floated micro-gyroscope

Author

Mingyuan Ren ; Xiaowei Liu ; Wen Zuo ; Zhigang Mao

Author_Institution

MEMS Center, Harbin Inst. of Technol., Harbin, China

fYear

2013

fDate

7-10 April 2013

Firstpage

799

Lastpage

802

Abstract

This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance of gyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, the model of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error of transfer characteristics.

Keywords

gyroscopes; microsensors; ANSOFT; capacitors; electromechanical interface model; gyroscope resistance; high resolution; liquid floated microgyroscope; nonlinear error; parasitic capacitances; reasonable interface circuit; sensors; signal noise ratio; transfer characteristics; Capacitors; Gyroscopes; Integrated circuit modeling; Liquids; Magnetic liquids; Mathematical model; Rotors; electromechanical interface model; gyroscopet; liquid floated;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559846

Filename

6559846