Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser

Author

Guo, X.B. ; Ding, J.N. ; Wang, S.Y. ; Qiu, J.H. ; Kan, B. ; Yuan, N.Y.

Author_Institution

Center for Low-Dimensional Mater., Micro-Nano Devices & Syst., Changzhou Univ., Changzhou, China

fYear

2013

fDate

7-10 April 2013

Firstpage

1218

Lastpage

1221

Abstract

Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance of silicon significantly in the studied wavelength range (0.25-1.1 μm). Mechanical durability of the micro-nano structure surface has been studied. It is indicated that wear is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability.

Keywords

durability; elemental semiconductors; high-speed optical techniques; infrared spectra; laser materials processing; lubrication; microfabrication; nanofabrication; nanostructured materials; polymers; semiconductor growth; silicon; surface treatment; ultraviolet spectra; visible spectra; wear; Si; black silicon; femtosecond laser; hierarchical microstructure surface; hierarchical nanostructure surface; laser processing; mechanical durability; perfluoropolyether; reflectance; surface modification; water saturation lubrication; wavelength 0.25 mum to 1.1 mum; wear; Friction; Lubrication; Optical surface waves; Silicon; Surface emitting lasers; Surface treatment; Surface waves; black silicon; mechanical durability; micro-nano structures;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559938

Filename

6559938