Temperature compensation of MEMS based resonant sensor with uniform mass sensitivity

High sensitive micro resonators are among the best way for measuring the mass of small entities. The principal of these sensors is based on measuring the resonance frequency shift. Putting the entity on the resonator led to change in the resonance frequency of the resonator, but changing the location of entity on the resonator´s surface or changing the temperature can cause undesirable shifts in resonance frequency. To tackle these issues, this paper first introduces a new design for folded springs, these springs attached to a platform for target attachment. Second a micro-thermoelectric cooler used to keep the sensor temperature constant. Bi₂Te₃ and Sb₂Te₃ are selected as the n-type and p-type thermoelectric materials respectively. The ceramic interface in thermoelectric coolers is used as a place to putdirectly mass sensors on it.