Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

Author

Kolbeck, Jonathan ; Anders, Andre

Author_Institution

Lawrence Berkeley Nat. Lab., Berkeley, CA, USA

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2602

Lastpage

2603

Abstract

A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Cathodic arc spot and plasma distributions were photographed during the transition from a pure argon background (0.5 Pa) to a mixture of argon and oxygen. We report about unusual cathode erosion patterns, which were narrow (~2 mm) with periodic pits when operating in argon, and broad (~10 mm) with periodic groves and ridges when operating in argon and oxygen mixtures.

Keywords

arcs (electric); argon; cathodes; erosion; gas mixtures; oxygen; plasma diagnostics; plasma sources; Ar-O₂; argon-oxygen mixture; cathode erosion patterns; cathodic arc source; cathodic arc spot; linear macroparticle filter; magnetron-type magnetic field; periodic groves; periodic ridges; plasma distributions; pressure 0.5 Pa; pure argon background; steered arc sources; Argon; Cathodes; Ignition; Plasmas; Surface impedance; Surface treatment; Vacuum arcs; Arc discharges; cathodes; plasma devices; plasma sources; plasma sources.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2328333

Filename

6840333