• DocumentCode
    620919
  • Title

    Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics

  • Author

    Casset, F. ; Devos, A. ; Sadtler, S. ; Le Louarn, A. ; Emery, P. ; Le Rhun, G. ; Ancey, P. ; Fanget, S. ; Defay, E.

  • Author_Institution
    LETI, CEA, Grenoble, France
  • fYear
    2012
  • fDate
    7-10 Oct. 2012
  • Firstpage
    2180
  • Lastpage
    2183
  • Abstract
    Thin-film sol-gel Pb(Zr0.52, Ti0.48)O3 (PZT) can be used in many actuator applications thanks to its high piezoelectric coefficients. The accurate knowledge of its mechanical properties such as Young´s modulus (E) and Poisson ratio (v) or stiffness matrix is a key point for predictive design, whereas the state of the art reports KPZT ranging from 70 to 139GPa. Those parameters can be accurately characterized by Picosecond Ultrasonics (PU) as detailed in this paper.
  • Keywords
    Poisson ratio; Young´s modulus; elasticity; lead compounds; piezoelectric thin films; ultrasonic applications; PZT; Poisson ratio; Young´s modulus; mechanical properties; picosecond ultrasonics; piezoelectric coefficients; sol-gel thin films; stiffness; Acoustics; Equations; Films; Mathematical model; Ultrasonic variables measurement; Young´s modulus; PZT; Picosecond Ultrasonics; Poisson ratio; Young modulus;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2012 IEEE International
  • Conference_Location
    Dresden
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-4561-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2012.0544
  • Filename
    6562398
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=620919