• DocumentCode
    631041
  • Title

    Learning in the synthesis of data-driven variable-gain controllers

  • Author

    Heertjes, Marcel ; Hunnekens, Bram ; van de Wouw, N. ; Nijmeijer, H.

  • Author_Institution
    Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands
  • fYear
    2013
  • fDate
    17-19 June 2013
  • Firstpage
    6685
  • Lastpage
    6690
  • Abstract
    To deal with performance trade-offs in the control of motion systems, a method is developed for designing variable-gain feedback controllers. The idea is to select a piecewise affine controller structure and, subsequently, to find the nonlinear controller parameter values of this structure by data-driven performance optimization. Herein an ℌ2 performance objective is minimized. As a result, variable-gain controllers are synthesized using techniques from the field of learning and optimization. The method is applied to a wafer stage simulation model.
  • Keywords
    H2 control; control system synthesis; feedback; gain control; motion control; nonlinear control systems; optimisation; semiconductor device manufacture; semiconductor technology; variable structure systems; H2 performance objective; data-driven performance optimization; data-driven variable-gain controller synthesis; motion systems control; nonlinear controller parameter values; performance trade-offs; piecewise affine controller structure; variable-gain controllers; variable-gain feedback controllers; wafer stage simulation model; Frequency-domain analysis; Gain; Optimization; Semiconductor device modeling; Stability criteria; Switches; Lur´e systems; data-driven optimization; gradient methods; motion control; self-tuning; wafer scanners;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    American Control Conference (ACC), 2013
  • Conference_Location
    Washington, DC
  • ISSN
    0743-1619
  • Print_ISBN
    978-1-4799-0177-7
  • Type

    conf

  • DOI
    10.1109/ACC.2013.6580889
  • Filename
    6580889