• DocumentCode
    633895
  • Title

    Failure localization methods for system-on-chip (SoC) using photon emission microscopy

  • Author

    Chen, Yuanfeng ; Chen, Huanting ; Zhang, X.W. ; Lai, P.

  • Author_Institution
    Sci. & Technol. on Reliability Phys. & Applic. of Electron. Component Lab., Fifth Electron. Res. Inst. of Minist. of Ind. & Inf. Technol., Guangzhou, China
  • fYear
    2013
  • fDate
    15-19 July 2013
  • Firstpage
    591
  • Lastpage
    594
  • Abstract
    System-on-Chip (SoC) is a major revolution in IC design where the whole functionality of a system is placed on a single chip. Its advantages include high performance, shorter design cycle time and space efficiency. But due to the circuit complexity, the high pin counts and ever increasing operating frequencies, System-on-Chip (SoC) devices drive the most challenging requirements for failure localization and mechanism analysis. PEM (Photon Emission Microscopy) analysis is important for failure analysis as they can help to locate the failed device directly or point out the analysis direction. This paper presents the failure localization method for System-on-Chip (SoC) using Photon Emission Microscope (PEM) and gives several successful failure analysis cases using PEM locating the failure site and FIB (Focused Ion Beam) and SEM (Scanning electronic Microscope) analyzing the failure mechanism.
  • Keywords
    failure analysis; focused ion beam technology; photoelectron microscopy; scanning electron microscopy; system-on-chip; FIB; PEM analysis; SEM; SoC; failure localization; failure mechanism; failure site; focused ion beam; mechanism analysis; photon emission microscopy; scanning electronic microscope; system-on-chip; Failure analysis; Optical microscopy; Photonics; Scanning electron microscopy; System-on-chip;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
  • Conference_Location
    Suzhou
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4799-1241-4
  • Type

    conf

  • DOI
    10.1109/IPFA.2013.6599230
  • Filename
    6599230