DocumentCode
633896
Title
Pulsing electrical over-stress (EOS) testing and its failure analysis for advanced process integrated circuits
Author
Yuan-Hung Tseng ; Chun-Liang Wang ; Yu-Chia Chang
Author_Institution
Innovative Super. Technol. (Shanghai) Co. Ltd., Shanghai, China
fYear
2013
fDate
15-19 July 2013
Firstpage
607
Lastpage
610
Abstract
In this paper, we develop a pulsing electrical over stress testing method to simulate different electrical over stress (EOS) in CMOS integrated circuits and the tolerance values distinguished from ESD failure. The electrical and deprocessing analysis shows that pulsing EOS testing can acquire a tolerance index of integrated circuits for production quality control.
Keywords
CMOS integrated circuits; electrostatic discharge; failure analysis; integrated circuit testing; CMOS integrated circuit; ESD failure; advanced process integrated circuit; electrical over-stress; failure analysis; production quality control; pulsing EOS testing; tolerance index; CMOS integrated circuits; Earth Observing System; Electrostatic discharges; Inspection; Photonics; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2013 20th IEEE International Symposium on the
Conference_Location
Suzhou
ISSN
1946-1542
Print_ISBN
978-1-4799-1241-4
Type
conf
DOI
10.1109/IPFA.2013.6599234
Filename
6599234
Link To Document