• DocumentCode
    656841
  • Title

    Effect of bismuth irradiation on crystalline silicon

  • Author

    Palade, Catalin ; Slav, Adrian ; Ciurea, Magdalena Lidia ; Lazanu, Sorina

  • Author_Institution
    Nat. Inst. of Mater. Phys., Magurele, Romania
  • Volume
    1
  • fYear
    2013
  • fDate
    14-16 Oct. 2013
  • Firstpage
    73
  • Lastpage
    76
  • Abstract
    N-type silicon single crystals with resistivity higher than 8000 Ωcm were irradiated with ions of Bi6+, of 28 MeV kinetic energy. At this energy, the ions are stopped into the wafer. Being much heavier and bigger than the host atoms, they produce major disturbances into the lattice. On the other hand, the produced collision cascade is the source of lattice defects which act as traps. We investigated them using the method of thermally stimulated currents without applied bias. The results are compared with those obtained from the analysis of silicon irradiated with I6+ ions.
  • Keywords
    bismuth; crystal defects; deformation; electrical resistivity; elemental semiconductors; ion beam effects; ion implantation; semiconductor doping; silicon; thermally stimulated currents; Si:Bi; collision cascade; electron volt energy 28 MeV; ion irradiation; lattice defects; resistivity; thermally stimulated currents; traps; wafer; Bismuth; Charge carrier processes; Electric fields; Ions; Lattices; Radiation effects; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2013 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4673-5670-1
  • Electronic_ISBN
    1545-827X
  • Type

    conf

  • DOI
    10.1109/SMICND.2013.6688093
  • Filename
    6688093