DocumentCode
656859
Title
Width-modulated microgas chromatography separation columns with silica nanoparticles stationary phase
Author
Shakeel, H. ; Dong Wang ; Heflin, Randy ; Agah, Masoud
Author_Institution
VT MEMS Lab., Virginia Tech, Blacksburg, VA, USA
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
Microgas chromatography separation columns typically employ channels with fixed cross sections. In this article, we demonstrate unidirectional microfabricated width-modulated columns (μWMC) that afford improved chromatographic efficiency, resolution and retention times compared to corresponding constant width bidirectional columns. The width of 1m-long, 250 μm-deep μWMC is gradually reduced from 120 μm to 20 μm at 1 μm/cm. The effect of inlet selection (120 μm or 20 μm) on chromatographic performance is also evaluated. Moreover, with our improved fabrication process, multiple serially connected devices are simultaneously coated for the first time with highly-stable silica nanoparticles utilizing layer-by-layer technique thus enabling constant film thicknesses.
Keywords
chromatography; microfabrication; nanofabrication; nanoparticles; separation; μWMC; constant film thickness; constant width bidirectional column; layer-by-layer technique; silica nanoparticles stationary phase; size 1 m; size 120 mum to 20 mum; size 250 mum; unidirectional microfabricated width-modulated column; width-modulated microgas chromatography separation column; Bonding; Coatings; Films; Gas chromatography; Micromechanical devices; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2013 IEEE
Conference_Location
Baltimore, MD
ISSN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2013.6688124
Filename
6688124
Link To Document