• DocumentCode
    656998
  • Title

    Cavity-enhanced mid-infrared on-chip chemical sensing using high-Q chalcogenide glass resonators

  • Author

    Hongtao Lin ; Chillakuru, Yeshwant ; McLaughlin, Keiran ; Lan Li ; Yi Zou ; Fei Deng ; Chaoying Ni ; Danto, Sylvain ; Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
  • fYear
    2013
  • fDate
    3-6 Nov. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    We experimentally demonstrated for the first time on-chip cavity-enhanced mid-infrared spectroscopic sensing of chemical molecules, performed near 5.2 μm wavelength using Ge23Sb7S70 resonators monolithically fabricated on CaF2 substrates.
  • Keywords
    antimony compounds; cavity resonators; chalcogenide glasses; chemical sensors; germanium compounds; infrared detectors; infrared spectroscopy; micromechanical resonators; microsensors; CaF2; CaF2 substrates; Ge23Sb7S70; chemical molecules; high-Q chalcogenide glass resonators; on-chip cavity-enhanced midinfrared spectroscopic sensing; Glass; Optical device fabrication; Optical resonators; Optical sensors; Optical waveguides; Mid-IR; Resonator; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2013 IEEE
  • Conference_Location
    Baltimore, MD
  • ISSN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2013.6688278
  • Filename
    6688278
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=656998