Robotic in situ stiffness cartography of InP membranes by dynamic force sensing

Author

Abrahamians, Jean-Ochin ; Sauvet, Bruno ; Polesel-Maris, Jerome ; Braive, R. ; Regnier, Stephane

Author_Institution

Inst. des Syst. Intelligents et de Robot., Univ. Pierre et Marie Curie, Paris, France

fYear

2013

fDate

3-7 Nov. 2013

Firstpage

1016

Lastpage

1021

Abstract

Typical methods of measuring mechanical properties at the micro-scale are destructive, and do not allow proper characterisation on resonant MEMS/NEMS. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor inside a SEM. Experiments are conducted on InP membranes 200nm thin, using a 9-DoF nano-manipulation system, complemented with virtual reality and automation tools. Results provide stiffness values ranging from 0.6 to 3 N/m on a single sample.

Keywords

control engineering computing; force sensors; membranes; micromanipulators; scanning electron microscopy; vibrations; virtual reality; 9-DoF nanomanipulation system; SEM; automation tools; dynamic force sensing; local stiffness variations cartography; robotic in situ stiffness cartography; suspended micro- membrane; tuning-fork- based dynamic force sensor; virtual reality; Probes; Scanning electron microscopy; Sensors; Solid modeling; Vibrations; Virtual reality;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems (IROS), 2013 IEEE/RSJ International Conference on

Conference_Location

Tokyo

ISSN

2153-0858

Type

conf

DOI

10.1109/IROS.2013.6696475

Filename

6696475