Elasticity estimation for sample by AFM utilizing previous line sample surface topography

Atomic Force Microscope (AFM) is a device which can be applied to measure the surface topography of sample in nano-scale. Because cantilever holds its physical contact with the sample, it is also possible to measure the elasticity of samples in principle. However, in comparison with the improvement of scanning performance, the technologies for viscosity and elasticity measurement are still underdeveloped. In this paper, we propose a method which can measure both the surface topography and the elasticity of samples. Recursive least-square approach is applied to estimate the elasticity of samples using the information of the previous surface topography.