Position feedback control of electrostatically controlled linear actuator system

In this paper, position control of electrostatically controlled linear actuator (ECLIA) utilizing feedback control and a micro potentiometer using a PDP connection is investigated. ECLIA comprises a PZT actuator, driving and holding electrodes, and multi sliders. The sliders are driven by a motion transmission of the PZT actuator and an electrostatic clutch mechanism. This produces stepwise motion of sliders. Hence, multi sliders have parallel, independent, precise motion, and large travel range. In the previous studies, the sliders were controlled without feedback signals. In this research, we utilize a micro potentiometer using a PDP connection to detect the position of a slider and feedback control. This improves significantly the performance of ECLIA.