• DocumentCode
    675163
  • Title

    Single-stripe tunable laser with Chirped Sampled Gratings fabricated by nanoimprint lithography

  • Author

    Yoshinaga, Hiroyuki ; Yanagisawa, M. ; Kaneko, Tetsuya ; Akiyama, Kazunari ; Tajima, Michio ; Shoji, Daisei ; Fujii, Teruya ; Shoji, Hajime

  • Author_Institution
    Sumitomo Electr. Ind., Ltd., Yokohama, Japan
  • fYear
    2013
  • fDate
    27-30 Oct. 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Fabrication of diffraction gratings of Chirped Sampled Grating Distributed Reflector (CSG-DR) laser by nanoimprint lithography (NIL) has been demonstrated. The diffraction gratings with highly uniform linewidth and period have been successfully fabricated by the combination of the reverse-tone NIL and precise etching techniques. The fabricated CSG-DR laser using NIL shows sufficiently wide tuning range of 40 nm as we designed.
  • Keywords
    chirp modulation; diffraction gratings; distributed feedback lasers; etching; laser tuning; nanolithography; optical fabrication; semiconductor optical amplifiers; CSG-DR laser; chirped sampled grating distributed reflector laser; diffraction gratings; etching; nanoimprint lithography; reverse-tone NIL; single-stripe tunable laser; uniform linewidth; Diffraction; Diffraction gratings; Etching; Gratings; Laser tuning; Planarization; Resins;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microoptics Conference (MOC), 2013 18th
  • Conference_Location
    Tokyo
  • Type

    conf

  • Filename
    6715052
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=675163