• DocumentCode
    676440
  • Title

    A semi-insulation structure for integrating vertical DMOS in smart power integrated circuits

  • Author

    Kui Ma ; Fa-shun Yang ; Jie-xin Lin ; Xing-hua Fu

  • Author_Institution
    Dept. of Electron., Guizhou Univ., Guiyang, China
  • fYear
    2013
  • fDate
    22-25 Oct. 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A semi-insulation structure was proposed for high block voltage for vertical DMOS power devices. A smart power integrated circuit (SPIC) was designed and fabricated. The tested result of D-S block voltage of vertical DMOS is about 120V. The breakdown voltage of the isolation structure is about 129V.
  • Keywords
    integrated circuit reliability; power MOSFET; power integrated circuits; semiconductor device breakdown; semiconductor device reliability; SPIC; breakdown voltage; integrating vertical DMOS; semi-insulation structure; smart power integrated circuits; vertical DMOS power devices; voltage 120 V; voltage 129 V; Dielectrics; Educational institutions; Epitaxial growth; Epitaxial layers; Junctions; Substrates; reliability; semi-insulatin structure; vertiacl DMOS;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    TENCON 2013 - 2013 IEEE Region 10 Conference (31194)
  • Conference_Location
    Xi´an
  • ISSN
    2159-3442
  • Print_ISBN
    978-1-4799-2825-5
  • Type

    conf

  • DOI
    10.1109/TENCON.2013.6718525
  • Filename
    6718525