Modelling of cantilever based MEMS RF switch

Author

Muley, Chaitali Anil ; Naveed, Syed A.

Author_Institution

J.N.E.C., Electron. Dept., Dr. Babasaheb Ambedkar Marathwada Univ., Aurangabad, India

fYear

2013

fDate

4-6 July 2013

Firstpage

1

Lastpage

5

Abstract

This paper deals with the electro-mechanical and electro-magnetic model of an electro statically actuated RF MEMS switch, Simple 1-D model for pull-in voltage is presented, along with the 2-port equivalent circuit network representation used for series switch. The Mechanical, Electrostatic and Electromagnetic analysis of the designed miniature RF MEMS cantilever beam is performed using COVENTORWARE tool. RF characterization has been carried out in the range of 1 to 40 GHz to provide return loss (S11), insertion loss (S21) between up (un-actuated) and down (actuated) states of the RF MEMS beam. It has been seen that the switch, so designed, results in low-loss performance.

Keywords

electrostatic actuators; equivalent circuits; microswitches; microwave switches; cantilever based MEMS RF switch; electromagnetic analysis; electromagnetic model; electromechanical model; electrostatic analysis; electrostatically actuated RF MEMS switch; frequency 1 GHz to 40 GHz; mechanical analysis; pull in voltage; two port equivalent circuit network; Electrodes; Force; Micromechanical devices; Microswitches; Radio frequency; Structural beams; Electrostatic model Electromagnetic model; Insertion loss; Isolation; Mechanical model; Return loss;

fLanguage

English

Publisher

ieee

Conference_Titel

Computing, Communications and Networking Technologies (ICCCNT),2013 Fourth International Conference on

Conference_Location

Tiruchengode

Print_ISBN

978-1-4799-3925-1

Type

conf

DOI

10.1109/ICCCNT.2013.6726806

Filename

6726806