DocumentCode
688631
Title
High-speed 3D direct laser writing of micro-optical elements
Author
Radke, Andre ; Fries, Benjamin ; Eicke, Dirk ; Niesler, Fabian ; Baretzky, Clemens ; Buckmann, Tiemo ; Wegener, Martin ; Thiel, Michael
Author_Institution
Nanoscribe GmbH, Eggenstein-Leopoldshafen, Germany
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.
Keywords
curing; diffractive optical elements; laser materials processing; light refraction; microfabrication; micromirrors; optical fabrication; photoresists; diffractive microoptical elements; high photoresist curing speed; high-speed diffraction-limited 3D direct laser writing; pivoted galvo mirrors; refractive microoptical elements; scan fields; High-speed optical techniques; Optical device fabrication; Optical diffraction; Optical sensors; Photonic crystals; Three-dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833006
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