DocumentCode
688716
Title
High-Q resonators on Bi-layer Si platform using wafer bonding
Author
Moradinejad, Hesam ; Atabaki, Amir H. ; Hosseinia, Amir H. ; Eftekhar, Ali Asghar ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We report the development of a high quality bi-layer silicon material platform using wafer bonding. We have experimentally demonstrated high quality-factor resonators (>200,000) in this material platform for both TE and TM polarizations.
Keywords
Q-factor; integrated optics; light polarisation; optical fabrication; optical materials; optical multilayers; optical resonators; silicon; wafer bonding; Si; TE polarization; TM polarization; high quality bilayer silicon material platform; high quality-factor resonator; wafer bonding; Decision support systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833091
Link To Document