• DocumentCode
    689007
  • Title

    Liquid deposition photolithography for photonic device fabrication

  • Author

    Urness, Adam C. ; McLeod, Robert R.

  • Author_Institution
    Dept. of Electr., Comput., & Energy Eng., Univ. of Colorado, Boulder, CO, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We describe a novel fabrication method, liquid deposition photolithography (LDP), for the creation of polymer photonic devices. We demonstrate LDPs ability to fabricate photonic devices by fabricating a waveguide array and gradient index lens.
  • Keywords
    gradient index optics; lenses; optical arrays; optical fabrication; optical polymers; optical waveguides; photolithography; LDP; gradient index lens; liquid deposition photolithography; photonic device fabrication; polymer photonic devices; waveguide array; Fabrication; Indexes; Liquids; Lithography; Photonics; Polymers; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833387
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689007