• DocumentCode
    689027
  • Title

    Silicon-on-nitride optical waveguides for mid- and near-infrared integrated photonics

  • Author

    Khan, Sharifullah ; Chiles, Jeff ; Ma, Jiaxin ; Fathpour, Sasan

  • Author_Institution
    CREOL, The Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Silicon-on-nitride waveguides are demonstrated at mid- and near-infrared wavelengths. The fabrication is based on bonding silicon to silicon-on-insulator dies coated with low-stress silicon nitride. At 3.39 μm wavelength, the measured propagation loss is ~5 dB/cm.
  • Keywords
    elemental semiconductors; integrated optics; light propagation; optical fabrication; optical losses; optical waveguides; silicon; silicon compounds; silicon-on-insulator; Si-SiNx; coating; low-stress silicon nitride; mid-infrared integrated photonics; mid-infrared wavelength; near-infrared integrated photonics; near-infrared wavelength; red propagation loss; silicon-on-insulator dies; silicon-on-nitride optical waveguides; wavelength 3.39 mum; Optical device fabrication; Optical waveguides; Photonics; Propagation losses; Silicon; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833407
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689027