DocumentCode
706694
Title
Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems
Author
Kotte, Gerolf ; Kabitzsch, Klaus
Author_Institution
Systema GmbH, Klipphausen, Germany
fYear
1999
fDate
Aug. 31 1999-Sept. 3 1999
Firstpage
2154
Lastpage
2159
Abstract
Today´s computer environments move toward higher complexity. The expansion of the local networks, the need for heterogeneous software and hardware, and the various interfaces between them, bring new challenges into computer science. The requirements for availability and reliability 24 hours per day and 7 days per week let increase the system administrator´s effort needed. Highest flexibility and self organising raises the software overall performance and is taylored to the customer´s needs in the best way possible. However, it also raises a lot of new issues in the field of tracing, trouble-shooting and fault diagnosis.
Keywords
fault diagnosis; reliability; semiconductor industry; fault diagnosis; reliability; semiconductor manufacturing monitoring; system administrator effort; Computers; Hardware; Manufacturing; Monitoring; Production facilities; Servers; Software;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (ECC), 1999 European
Conference_Location
Karlsruhe
Print_ISBN
978-3-9524173-5-5
Type
conf
Filename
7099638
Link To Document