• DocumentCode
    708089
  • Title

    New simulation method for Deep Trench Termination diode (DT2) using mixed-mode TCAD sentaurus

  • Author

    Baccar, F. ; Arbess, H. ; Theolier, L. ; Azzopardi, S. ; Woirgard, E.

  • Author_Institution
    IMS Lab., Univ. of Bordeaux, Talence, France
  • fYear
    2015
  • fDate
    19-22 April 2015
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    This work presents a methodology using mixed-mode simulation with TCAD Sentaurus to model, analyze, and optimize the representation of the Deep Trench Termination Diode (DT2) without increasing the number of nodes and the computation time. Moreover, several convergence problems which can be found for many kinds of simulations have been resolved.
  • Keywords
    isolation technology; semiconductor diodes; technology CAD (electronics); DT2 diode; TCAD Sentaurus; deep trench termination diode; mixed-mode simulation; Anodes; Convergence; IP networks; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
  • Conference_Location
    Budapest
  • Print_ISBN
    978-1-4799-9949-1
  • Type

    conf

  • DOI
    10.1109/EuroSimE.2015.7103122
  • Filename
    7103122
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=708089