Verification and test system technology for CMOS-MEMS switches

Author

Liu Peng ; Wenzhong Lou ; Dai Ximing ; Lu Yufei

Author_Institution

Sch. of Mechatronical Eng., Beijing Inst. of Technol., Beijing, China

fYear

2015

fDate

7-11 April 2015

Firstpage

585

Lastpage

588

Abstract

A high-performance, low-cost test equipment system for characterization of MEMS switch is to be proposed in this paper, and the purpose is set to master the fundament of the embedded algorithms of the wafer and system production testing. The team has implemented the real-time analysis for MEMS switch, proving the feasibility of the design, based on the original data collected during the dedicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, the framework of the system platform in the future is described.

Keywords

CMOS integrated circuits; hardware-software codesign; integrated circuit testing; microswitches; CMOS-MEMS switches; embedded algorithms; embedded software; low-cost test equipment system; microsystem hardware; system production testing; test system technology; Metals; Microswitches; Prediction algorithms; Reliability; Software algorithms; Test equipment; CMOS-MEMS Switch Microsystem; FPGA; Test Equipment System; Testing Algorithms;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on

Conference_Location

Xi´an

Type

conf

DOI

10.1109/NEMS.2015.7147497

Filename

7147497