• DocumentCode
    722816
  • Title

    Hybrid-type temperature sensor using n-type low-temperature processed poly-Si thin-film transistors

  • Author

    Kitajima, Shuhei ; Kito, Katsuya ; Hayashi, Hisashi ; Matsuda, Tokiyoshi ; Kimura, Mutsumi

  • Author_Institution
    Dept. of Electron. & Inf., Ryukoku Univ., Otsu, Japan
  • fYear
    2015
  • fDate
    4-5 June 2015
  • Firstpage
    84
  • Lastpage
    85
  • Abstract
    We have developed a hybrid-type temperature sensor using n-type low-temperature processed poly-Si thin-film transistors. The advantages of the hybrid-type temperature sensor are that the large temperature dependence of the off-leakage current can be utilized, and simultaneously only a digital circuit is required to count the digital pulse.
  • Keywords
    elemental semiconductors; leakage currents; silicon; temperature sensors; thin film transistors; Si; hybrid-type temperature sensor; n-type low-temperature process; off-leakage current; poly-Si thin-film transistors; Films; Temperature; Temperature dependence; Temperature measurement; Temperature sensors; Thin film transistors; hybrid-type temperature sensor; low-temperature processed poly-Si (LTPS); n-type; thin-film transistor (TFT);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Future of Electron Devices, Kansai (IMFEDK), 2015 IEEE International Meeting for
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4799-8614-9
  • Type

    conf

  • DOI
    10.1109/IMFEDK.2015.7158561
  • Filename
    7158561