Micro-fabricated spherical rubidium vapor cell and its integration in 3-axis atomic magnetometer

High sensitive atomic magnetometers play an important role in many fields including geophysical mapping, space science, nuclear magnetic resonance, health care and perimeter and remote monitoring. In this study, a novel method to fabricate the micro spherical Rubidium vapor cell has been investigated and the integration of micro spherical rubidium vapor cell in 3-axis atomic magnetometer has been demonstrated successfully. First of all, a fabrication process for micro spherical alkali vapor cells is introduced. Then the prepared uniform wafer-level micro spherical rubidium vapor cell has been characterized by Ultraviolet spectrophotometer as well as a laser frequency locking system. At last, 3-axis atomic magnetometer based on the micro spherical rubidium vapor cell has been demonstrated. Results show that micro spherical rubidium vapor cell has been fabricated successfully. Results also indicate that a 3-axis atomic magnetometer based on the micro spherical rubidium vapor cell could measure magnetic fields along three directions (B_X, B_Y and B_Z).