• DocumentCode
    723109
  • Title

    Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing

  • Author

    Bower, Christopher A. ; Meitl, Matthew A. ; Bonafede, Salvatore ; Gomez, David

  • Author_Institution
    X-Celeprint Inc., Research Triangle Park, NC, USA
  • fYear
    2015
  • fDate
    26-29 May 2015
  • Firstpage
    963
  • Lastpage
    967
  • Abstract
    Integrating microscale electronic devices onto non-native substrates enables new kinds of products with desirable functionalities and cost structures that are inaccessible by conventional means. Micro assembly technologies are the practical ways to make such microscale heterogeneous device combinations possible. Elastomer stamp micro-transferprinting technology (μTP) is a widely-demonstrated form of micro assembly, having demonstrated applicability in optical communications, magnetic storage, concentrator photovoltaics and display technologies. Here we describe new experiments designed to assess the useful lifetime of the viscoelastic elastomer transfer stamp, and also describe the methodology and results for heterogeneous integration of microscale compound semiconductor devices onto non-native substrates using μTP.
  • Keywords
    microassembling; printing; concentrator photovoltaics; display technologies; heterogeneous integration; magnetic storage; microassembly technology; microscale compound semiconductor device; microtransfer printing; nonnative substrates; optical communications; viscoelastic elastomer transfer stamp; Assembly; Gallium arsenide; Polymers; Printing; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
  • Conference_Location
    San Diego, CA
  • Type

    conf

  • DOI
    10.1109/ECTC.2015.7159711
  • Filename
    7159711