DocumentCode
723109
Title
Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing
Author
Bower, Christopher A. ; Meitl, Matthew A. ; Bonafede, Salvatore ; Gomez, David
Author_Institution
X-Celeprint Inc., Research Triangle Park, NC, USA
fYear
2015
fDate
26-29 May 2015
Firstpage
963
Lastpage
967
Abstract
Integrating microscale electronic devices onto non-native substrates enables new kinds of products with desirable functionalities and cost structures that are inaccessible by conventional means. Micro assembly technologies are the practical ways to make such microscale heterogeneous device combinations possible. Elastomer stamp micro-transferprinting technology (μTP) is a widely-demonstrated form of micro assembly, having demonstrated applicability in optical communications, magnetic storage, concentrator photovoltaics and display technologies. Here we describe new experiments designed to assess the useful lifetime of the viscoelastic elastomer transfer stamp, and also describe the methodology and results for heterogeneous integration of microscale compound semiconductor devices onto non-native substrates using μTP.
Keywords
microassembling; printing; concentrator photovoltaics; display technologies; heterogeneous integration; magnetic storage; microassembly technology; microscale compound semiconductor device; microtransfer printing; nonnative substrates; optical communications; viscoelastic elastomer transfer stamp; Assembly; Gallium arsenide; Polymers; Printing; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/ECTC.2015.7159711
Filename
7159711
Link To Document