DocumentCode
723170
Title
Effect of high temperature bake on evolution of interfacial structure in Cu wire bonds and its impact on Cu/Al interfacial corrosion
Author
Kejun Zeng ; Nangia, Amit
Author_Institution
Texas Instrum. Inc., Dallas, TX, USA
fYear
2015
fDate
26-29 May 2015
Firstpage
1586
Lastpage
1593
Abstract
Although Cu wire bonding has been successful and in high volume production in the industry, sporadic failure of ball bonds on Al pad due to interfacial corrosion has been reported. Different corrosion reactions have been proposed in the literature, but it is still not clear how these reactions could have occurred in the environment of green mold compounds whose contents of free chloride ions were at low ppm levels. In this paper, an experiment was performed to create cracks by bake at 300°C in the interface between Cu ball and Al pad to study the mechanism of interfacial corrosion. It was found that after autoclave test interfacial corrosion occurred only in the units where the Cu/Al interface was cracked. In those units where the Cu/Al interface was not cracked, autoclave test did not result in failure. Evolution of microstructure of inter-metallic compounds and formation of micro voids and cracks in the interface during bake is discussed. The theory of crevice corrosion is applied to explain how the IMC layer and Al pad get corroded in a relatively clean environment. Possible correlation of interfacial corrosion to sustained event of high current density or high voltage in packages is proposed.
Keywords
alloys; aluminium; copper; corrosion testing; lead bonding; semiconductor device packaging; Al pad; Cu ball; Cu-Al; IMC layer; autoclave test interfacial corrosion; ball bond sporadic failure; chloride ions; intermetallic compounds; temperature 300 degC; wire bonds; Bonding; Compounds; Corrosion; Gold; Ions; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/ECTC.2015.7159808
Filename
7159808
Link To Document