Performance analysis of an RF MEMS TPoS resonator using FE modelling

Author

Farrugia, Russell ; Grech, Ivan ; Casha, Owen ; Micallef, Joseph ; Gatt, Edward

Author_Institution

Dept. of Microelectron. & Nanoelectron., Univ. of Malta, Msida, Malta

fYear

2015

fDate

27-30 April 2015

Firstpage

1

Lastpage

6

Abstract

This paper presents an analysis, using finite element modelling, of a 40 MHz contour-mode RF MEMS resonator based on the SINTEF thin-film piezoelectric-onsubstrate (TPoS) fabrication technology. Novel simulation techniques are proposed which enable an exhaustive analysis of the relevant resonator characteristics including temperature drift and quality factor. This model also enables the analysis of possible tuning techniques which can be used to compensate for temperature and process-induced variations in the resonant frequency. The effect of the thickness ratio of the PZT film to the substrate on the resonant frequency and frequency shift is also discussed.

Keywords

Q-factor; finite element analysis; micromechanical resonators; FE modelling; PZT film; RF MEMS TPoS resonator; finite element modelling; frequency shift; quality factor; resonant frequency; temperature drift; thin-film piezoelectric-onsubstrate fabrication technology; Damping; Finite element analysis; Micromechanical devices; Radio frequency; Resonant frequency; Substrates; Temperature; MEMS Resonator; MEMS filter; PZT; Piezoelectric; RF MEMS; TPoS;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on

Conference_Location

Montpellier

Print_ISBN

978-1-4799-8627-9

Type

conf

DOI

10.1109/DTIP.2015.7161004

Filename

7161004