Robotic on-wafer probe station for microwave characterization in a scanning electron microscope

Author

Haddadi, K. ; El Fellahi, A. ; Marzouk, J. ; Arscott, S. ; Boyaval, C. ; Lasri, T. ; Dambrine, G.

Author_Institution

Inst. of Electron., Microelectron. & Nanotechnol., Univ. Lille 1, Villeneuve d´Ascq, France

fYear

2015

fDate

17-22 May 2015

Firstpage

1

Lastpage

3

Abstract

The concept and first results of a novel instrumentation for microwave characterization at the micro-and nanoscale are presented. A nanorobotic on-wafer probing set-up is being developed and integrated into a high resolution scanning electron microscopy (SEM). The setup uses home-made miniaturized ground-signal-ground (GSG) probes with 1 μm² tips contacts fabricated on silicon-on-insulator (SOI) technology. RF one-port measurements considering a coplanar test load with a 1.8 μm-width gap are presented for the first time up to 4 GHz.

Keywords

elemental semiconductors; microsensors; microwave detectors; microwave measurement; nanosensors; scanning electron microscopy; silicon; silicon-on-insulator; GSG probe; RF one-port measurement; SEM; SOl technology; Si; coplanar test load; distance 1.8 mum; ground-signal-ground probe; microwave characterization; nanorobotic on-wafer probing set-up; scanning electron microscope; silicon-on-insulator technology; Frequency measurement; Radio frequency; Robots; Scanning electron microscopy; Thickness measurement; Visualization; ground-signal-ground probe; high frequency (HF) measurement; on-wafer probe station; scanning electron microscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium (IMS), 2015 IEEE MTT-S International

Conference_Location

Phoenix, AZ

Type

conf

DOI

10.1109/MWSYM.2015.7166970

Filename

7166970