Power efficient microheater for wavelength selective infrared emitter and CO2 gas sensing

Author

Ishihara, H. ; Masuno, K. ; Ishii, M. ; Kumagai, S. ; Sasaki, M.

Author_Institution

Yazaki Corp., Shizuoka, Japan

fYear

2015

fDate

21-25 June 2015

Firstpage

200

Lastpage

203

Abstract

A new microheater for the wavelength selective infrared emitter, which we have proposed, is fabricated showing the clear enhanced emission peak due to the surface plasmon polariton. Compared to the previous device, the thermal isolation is improved using 2μm-thick Si membrane having 3.6 and 5.4mm outer diameter. The emission at the wavelength of the absorption band of CO₂ gas is enhanced confirming the suitability for the gas sensing. Against input power, the intensity at the peak wavelength shows the steeper increase than the background intensity.

Keywords

carbon compounds; elemental semiconductors; gas sensors; infrared detectors; membranes; micromechanical devices; silicon; CO₂; Si; absorption band; background intensity; gas sensing; membrane; power efficient microheater; size 2 mum; size 3.6 mm to 5.4 mm; surface plasmon polariton; thermal isolation; wavelength selective infrared emitter; Etching; Gratings; Heating; Plasmons; Resists; Silicon; Surface waves; Microheater; Thermal isolation; Wavelength selective infrared emitter;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180896

Filename

7180896