A rotational MEMS diffraction grating for realization of micro-sized spectroscope system

Author

Yamamoto, Y. ; Shinozaki, R. ; Oka, Y. ; Asahi, I. ; Ninomiya, H. ; Shimokawa, F. ; Oohira, F. ; Takao, H.

Author_Institution

Kagawa Univ., Kagawa, Japan

fYear

2015

fDate

21-25 June 2015

Firstpage

208

Lastpage

211

Abstract

In this paper, a novel rotational MEMS diffraction grating for realization of micro-sized spectroscope system with SiOB (Silicon Optical Bench) technology is newly developed, and its evaluation results are reported for the first time. Since this device has “out-of-plane” optical surface on the rotational actuator, concept of micro optical bench is applicable to realize precision alignment in the micro spectrometer. A diffraction grating was fabricated by silicon, and it is mounted on the stage of an electrostatic rotational actuator. Driving the stage by ±3.5° at DC80V, wavelength of white light was successfully modulated in the range from 515nm to 763nm at an 11% diffraction efficiency.

Keywords

diffraction gratings; electrostatic actuators; elemental semiconductors; micro-optics; silicon; Si; diffraction efficiency; electrostatic rotational actuator; micro optical bench; micro-sized spectroscope system; out-of-plane optical surface; precision alignment; rotational MEMS diffraction grating; silicon optical bench technology; voltage 0 V to 80 V; wavelength 515 nm to 763 nm; white light; Actuators; Diffraction; Diffraction gratings; Micromechanical devices; Optical device fabrication; Optical fibers; Diffraction Grating; Optical Bench; Optical-MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180898

Filename

7180898