• DocumentCode
    733012
  • Title

    Permanent trimming of silicon ring resonator filters by thermal modification

  • Author

    Spector, S.J. ; Knecht, J.M. ; Juodawlkis, P.W.

  • Author_Institution
    Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Reported here is a method for trimming the resonant frequency of microring resonators by permanent thermal modification of a waveguide cladding. This method would use in-situ heaters, avoiding the need for highly specialized equipment.
  • Keywords
    elemental semiconductors; micro-optomechanical devices; micromechanical resonators; optical resonators; optical waveguide filters; optical waveguides; resonator filters; silicon; Si; in-situ heaters; microring resonators; permanent thermal modification; permanent trimming; resonant frequency; silicon ring resonator filters; waveguide cladding; Filter banks; Heating; Indexes; Optical filters; Optical ring resonators; Optical variables control; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7183449
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733012