• DocumentCode
    733324
  • Title

    Bending behavior of flexible crystalline silicon nanomembrane photonic crystal microcavities

  • Author

    Xiaochuan Xu ; Subbaraman, Harish ; Chakravarty, Swapnajit ; Chen, Ray T.

  • Author_Institution
    Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.
  • Keywords
    Q-factor; bending; elemental semiconductors; micro-optics; microcavities; nanophotonics; optical testing; photonic crystals; silicon; Si; bending behavior; flexible crystalline silicon nanomembrane photonic crystal microcavities; quality factor; Films; Microcavities; Photonic crystals; Photonics; Polyimides; Silicon; Strain;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7183761
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733324