• DocumentCode
    745904
  • Title

    Scanning microellipsometry for extraction of true topography

  • Author

    Holmes, R.D. ; See, C.W. ; Somekh, M.G.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Nottingham Univ., UK
  • Volume
    31
  • Issue
    5
  • fYear
    1995
  • fDate
    3/2/1995 12:00:00 AM
  • Firstpage
    358
  • Lastpage
    359
  • Abstract
    The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved
  • Keywords
    ellipsometry; light interferometry; measurement errors; surface topography measurement; amplitude distributions; back focal plane; optical reflection coefficient; phase distributions; scanning interferometer; scanning microellipsometry; topography measurement;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19950278
  • Filename
    369962
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=745904